27 September 2015 2 9K Report

I want to deposit 300nm insulating layer on a thick gold layer. It is said that the adhesion between Au and SiO2 is very poor. Do you know any other common material that is sticky to Au?

The Ti or Cr may be a good adhesion layer, but my sample (micron size) is on the Au layer, so any conducting material cannot be deposited between the Au layer and insulating layer.

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