It looks like real line, not an artifact. M-series of Bi or Pb? I would acquire a spectrum at highest accelerating voltage possible (30 kV, usually) so that K or L series of the same element can be detected.
what is about Argon k-alpha1,2 ( at about 2,95keV) and Argon k-beta1,3 (at about 3,19keV).
How do you prepared the sample ?
You may have done a manufacturing step in Argon. There are hints in the internet that Ar is often used as inert gas during CNT production process. Perhaps the CNTs were (partially) filled with Ar or Ar is being trapped elsewhere in the interior of your layered sample without having an efficient escape path.
Or you have cleaned the substrate by Ar ion bombardment prior to CNT deposition and the Si pores were (partially) filled by Ar.
Or you may have stored the substrate in Ar atmosphere......a lot of possibilites....
The presence of a peak near 3 KeV after the deposition might be due to the existence Argon kα1,2 and Argon k1,3 ,Which is used as inert gas during MWCNTs production process."
This statement could be true in certain extreme condition where Argon can be dissolved into particular solid lattice. However, the conditions for this experiment has no possibilities for argon to dissolve in Silicon matrices/lattices.
for this reason how can explain that
I need a strong support to cited for this explanation