During annealing it may so happen that a thin film under goes a partial crystallization.
You can implement XRD experiment. After that you will obtain a diffractogram, in which you should compare integral intensity below amorphus halo and below all curve. It will be the degree of amorphization. But it's just an estimation.
Dear Dr. Madhusudan Roy
Have a nice time and good day
You can get excellent information by using XRD measurements.
The appended papers may help you in your study.
https://www.researchgate.net/publication/300093556_IJAR-4360_--_9-4-2016
https://www.researchgate.net/publication/277952808_Final_-_Microstructure_and_crystal_imperfections_of_nanosized_CdSxSe1-x_thermally_evaporated_thin_films_-_final_form?_iepl%5BviewId%5D=COZ9NbpL0Cwr6WP0xvREJ4Ub&_iepl%5Bcontexts%5D%5B0%5D=timeline&_iepl%5Bdata%5D%5BactivityData%5D%5BactivityId%5D=277952808&_iepl%5Bdata%5D%5BactivityData%5D%5BactivityType%5D=Publication&_iepl%5Bdata%5D%5BactivityData%5D%5BactivityTimestamp%5D=1433808000&_iepl%5Bdata%5D%5BviewType%5D=self&_iepl%5BinteractionType%5D=publicationClickThrough
https://www.researchgate.net/publication/277952802_Crystal_imperfections_and_Mott_parameters_of_sprayed_nanostructure_IrO2_thin_films
https://www.researchgate.net/publication/268872186_Microstructural_characterization_of_Al-Mg_alloys_by_X-ray_diffraction_line_profile_analysis
Good luck
Yours,
Ahmed Saeed Hassnien
Article Microstructural characterization of Al-Mg alloys by X-ray di...
Data Crystal imperfections and Mott parameters of sprayed nanostr...
Data Final - Microstructure and crystal imperfections of nanosize...
Data Microstructural characterization of Al-Mg alloys by X-ray di...
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