What is the difference between ion beam erosion, irradiation, and etching?

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Palleboina Suryanarayana

ION BEAM ERODED MEANS SPUTTERING OF TARGET WITH ION BEAM,

ION BEAM IRRADIATION MEANS DEFECTS GENERATION

ION BEAM ETCHING MEANS PHYSICAL ETCHING OF PATTERN UNDER MASK

Gavin Richard Bell

Thank you for your clarification Andrei. I have sometimes used "sputtering" and "dry etching" rather interchangeably when referring to Ar ion surface cleaning, but it's probably better to stick to "sputtering".

Basanta Kumar Parida

Andrei Stanishevsky sir,

That means sputtering comes under ion beam erosion,then what about ion beam etching. Do all the three terms have the different application in ion beam field.