The two techniques give spectra and follow the surface compound. Analytical results had been visible with TEM with EDS, but SEM gave the only image surface with best accuracy.
The two tecchnics give spectra and follow the surface compound.,analytical results had been well visible by TEM with EDS but SEM give only image surface with best accuracy but no informations about qualitative and quantitative result about the chimical surface envirronment
it depends what you want to see
TEM or SEM with EDS will give you a chemical information about your surface
with TEM you need to prepare your sample for a transmission analysis (atomic scale)
with SEM you will have the surface information with a few nanometer of resolution
another technic : Ellipsometry will give you an information about the thicknesses and optical propreties
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