What is the best process to dilute ZEP520A EBL resist with Anisole?

17 April 2023 0 6K Report

I wish to have a resist thickness of 100-120nm. What is the best process to dilute ZEP520 with Anisole? The recommended ratio is 1:1.

After dilution, should there be a change in the prebake and developing time?

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