If really you need the answer to such a broad question, then there's probably no alternative to going to the (real or virtual) library and study the massive literature on that topic.
When I had to make nano steps image with AFM I used water and salt. After few days I obtain crystals with nano-steps on the surface. Of course, I dont think my answer is information what You need, but I wrote it to show how many differ answers may be because of leak of information of your question. Maybe If you could ask a little more precisely, we would be able to give you a proper answer?
If really you need the answer to such a broad question, then there's probably no alternative to going to the (real or virtual) library and study the massive literature on that topic.