in low resolution of xps spectra, there are carbon , oxygen and silicon while in environment of experiment there was nitrogen also. can I do fitting for bonding such as SiNx, Si NxOy etc in high resolution of Si 2p?
Martin E. McBriarty
In the Si 2p spectrum, the separations between pure Si, Si3N4, and SiO2 are pretty large (see attached link). So, if you have a well-calibrated spectrum (e.g. the C-C component of the C 1s peak is at about 284.8 eV) and good spectrometer resolution, you should be able to distinguish these components. If you don't see N 1s signal at about 400 eV, however, then there is no nitride within the top few nm.
http://xpssimplified.com/elements/silicon.php
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