Hello everyone,

I have been studying x-ray photoelectron spectroscopy (XPS) for a while. I have studied loads of literature works on XPS. It has already been established that we have to (should) clean the surface before data collection to get rid of the surface contamination, which comes from the contact of the sample with air. Moreover, it is also reported in the literature that the surface chemistry (many other effects are also possible) of your sample might change depending on the etching parameters selection, such as etching particle, energy, angle, and time/rate (depth), which leads to unreliable data. Another thing is that if we successfully etch the sample in any depth without damaging it, it will not show the surface properties but the bulk state of the sample. However, I have not found any solid reference for these parameters yet. In our case, we are using Ar+ ions as an etching particle and etched at different depths with different energies.

What is the suitable etching energy, angle, and time/rate (depth) for studying surface properties correctly?

I have not attached any reference articles since these are summarized information.

Thanks!

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