I am working on SiO2/Si3N4/SiO2 planar waveguide structure and characterized the Si3N4 (core layer, deposited at different sputtering powers)through AFM for RMS surface roughness. (in range of 0.80 nm to 1.04 nm)

I want to verify the effect of surface roughness on propagation losses (scattering). Is there any literature that shows the correlation between RMS surface roughness and propagation losses ?

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