hello,
I have some gold electrodes onto my COC (topas) substrate and I want to isolate them and just let the surface of the electrodes free (no the connections): We tried SU-8 as passivative layer but the substrate becomes very fragile. I wonder if the solvent of the SU-8 is not compatible with COC. Someone did ever seen this? What kind of insulator layer can I use?
Thanks in advance!
Sandrine
Can you please explain what you mean by surface becomes fragile? SU-8 deposition method and if you UV treated it?
Hey Hassan, I spin coat the SU-8 and do normal photolitho process to open just the electrodes surfaces so yes i UV treat. What I mean by fragil? The substrate breaks if it is wrapped.
Photoresists normally do not make substrate fragile. I suggest trying some other photoresist which gets dissolved in other developer than SU-8. Otherwise, you may need to look for selective deposition method of insulators without photolithography.
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