Hi,
Good afternoon. We are trying to make patterns on lithium niobate(which basically glass surface). We are cleaning our chips with acetone and IPA for 5 mins each. To do the pattern, we are using negative tone resist, HSQ (Fox 16 from Dow). We are spin coating at 2000 rpm for 1 min (approximately 600 nm of HSQ) and baking on the hot plate (80 degrees Celsius) for 4 mins. After ebeam lithography, we are developing the chips on 25% TMAH for 30 secs at 80 degrees celsius. However, structures are not sticking to the surface. Any solutions with references would be very helpful in that respect?
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