Hello, every one. I'm trying to simulate sulfur-doped InP and silicon-doped InP. Here is my code:

math coord.ucs

##--- 1. Substrate Definition

line x location= 0.0 spacing= 1.0 tag= InPTop

line x location= 50.0 spacing= 10.0

line x location= 0.5 spacing= 50

line x location= 5.0 spacing= 0.2 tag= InPBottom

line y location= 0.0 spacing= 10.0 tag= Mid

line y location= 0.05 spacing= 10.0 tag= Right

##--- 2. Import advanced & personal calibration

AdvancedCalibration 2016.03

source user_calibration.fps

##--- 3. Initialize InP-S substrate

region InP xlo= InPTop xhi= InPBottom ylo= Mid yhi= Right

init concentration= 2.0e+18 field= Sulfur

##--- 4. Deposit InP-Si layer

grid set.min.normal.size= 3 set.normal.growth.ratio.2d= 1.4

doping name= InP_Si field= Silicon values= {1e18 1e18} depths= {0 0.5}

deposit material= InP type= isotropic rate= 1 time= 0.5 doping= {InP_Si}

I expected to see the "NetActive" option in data panel of Svisual, but I never saw them. Therefore, I thought it might be due to the parameter of dopants of InP in parameter database. I add some parameters in my "user_calibration.fps" file. Here is the "user_calibration.fps" code:

###--- Dopant parameter settings

##--- Silicon dopant in InP

pdbDopantLike InP Silicon

pdbSetSwitch InP Silicon ActiveModel Solid

pdbSetSwitch InP Silicon DiffModel ChargedReact

#--- ChargedReact diffusion model parameters

pdbSetDouble InP InInt Cstar 1e+10 ;# Self-interstitial conc. in intrinsic equilibrium

pdbSetDouble InP PInt Cstar 1e+10

pdbSetDouble InP Indium CsubStar 1e+18 ;# Constituent atom conc. in equilibrium

pdbSetDouble InP Phosphorus CsubStar 1e+18

pdbSetDoubleArray InP VacIII ChargeStates { -2 {0.1} -1 {0.2} 0 {0.4} 1 {0.2} 2 {0.1} } ;# Charge-state frac. of vacancies

pdbSetDoubleArray InP VacV ChargeStates { -2 {0.1} -1 {0.2} 0 {0.4} 1 {0.2} 2 {0.1} }

pdbSetDoubleArray InP Silicon IntIII D { -2 {1e-14} -1 {1e-14} 0 {1e-14} 1 {1e-14} 2 {1e-14} } ;# Effective diffusivity of dopant interstitial

pdbSetDoubleArray InP Silicon IntV D { -2 {1e-14} -1 {1e-14} 0 {1e-14} 1 {1e-14} 2 {1e-14} }

pdbSetDoubleArray InP Silicon IntIII D { -2 {1e-14} -1 {1e-14} 0 {1e-14} 1 {1e-14} 2 {1e-14} } ;# Effective diffusivity of dopant vacancy

pdbSetDoubleArray InP Silicon IntV D { -2 {1e-14} -1 {1e-14} 0 {1e-14} 1 {1e-14} 2 {1e-14} }

pdbSetDoubleArray InP Silicon IntIII Dpair { -2 {1e-14} -1 {1e-14} 0 {1e-14} 1 {1e-14} 2 {1e-14} } ;# Self-diffusivity of dopant interstitial

pdbSetDoubleArray InP Silicon IntV Dpair { -2 {1e-14} -1 {1e-14} 0 {1e-14} 1 {1e-14} 2 {1e-14} }

pdbSetDoubleArray InP Silicon IntIII Dpair { -2 {1e-14} -1 {1e-14} 0 {1e-14} 1 {1e-14} 2 {1e-14} } ;# Self-diffusivity of dopant vacancy

pdbSetDoubleArray InP Silicon IntV Dpair { -2 {1e-14} -1 {1e-14} 0 {1e-14} 1 {1e-14} 2 {1e-14} }

pdbSetDoubleArray InP Silicon Indium kfKickOut { -2 {1e-10} -1 {1e-10} 0 {1e-10} 1 {1e-10} 2 {1e-10}} ;# Kick-out reaction rate const.

pdbSetDoubleArray InP Silicon Phosphorus kfKickOut { -2 {1e-10} -1 {1e-10} 0 {1e-10} 1 {1e-10} 2 {1e-10}} ;# Kick-out reaction rate const.

pdbSetDoubleArray InP Silicon VacIII kfKickOut { -2 {1e-10} -1 {1e-10} 0 {1e-10} 1 {1e-10} 2 {1e-10}} ;# Kick-out reaction rate const.

pdbSetDoubleArray InP Silicon VacV kfKickOut { -2 {1e-10} -1 {1e-10} 0 {1e-10} 1 {1e-10} 2 {1e-10}} ;# Kick-out reaction rate const.

pdbSetDoubleArray InP Silicon VacIII kfFTM { {-2,-2} {1e-10} {-1,-1} {1e-10} {0,0} {1e-10} {1,1} {1e-10} {2,2} {1e-10}} ;# Kick-out reaction rate const.

pdbSetDoubleArray InP Silicon VacV kfFTM { {-2,-2} {1e-10} {-1,-1} {1e-10} {0,0} {1e-10} {1,1} {1e-10} {2,2} {1e-10}} ;# Kick-out reaction rate const.

pdbSetDouble InP Silicon Csub.Ratio {0.3}

##--- Sulfur dopant in InP

pdbSetSwitch InP Sulfur ActiveModel Solid

pdbSetSwitch InP Sulfur DiffModel ChargedReact

pdbSetDouble InP Potential ni 1.3e+7

Briefly speaking, I chose "Solid" activation model and "ChargedReact" diffusion model for silicon/sulfur-dopant in InP. In the end, no matter whether I set the parameters of ChargedReact diffusion model, there is still no "NetActive" option in my data panel of Svisual.

Could you please help me? I really need to solve this issue. Thank you so much!