In the name of Allah

Hello Azzeddine DEHBI-ALAOUI

Why don't you use RF system of a microwave Oven?

Its Magnetron is cheap.

And you can make your own High Voltage supply, Matching Circuit, ...

Or

You may build a Switch Mode Power Supply (SMPS) using MOSFETs instead.

For example take a look at these:

(A High Power Supply:)

http://w5jgv.com/hv-ps1/

https://www.google.com/search?hl=fa&gbv=2&q=High+Voltage+switching+mosfet&bav=on.2,or.r_gc.r_pw.,cf.osb&biw=1041&bih=513&wrapid=tlif133138194181931&um=1&ie=UTF-8&tbm=isch&source=og&sa=N&tab=wi&ei=w0ZbT_3ZHsbi4QToq-G_Dw&sout=0&ved=0CD0QxxQ

Or

You can make a plasma using DC Voltage to sputter metals, depending on the pressure of the chamber.

in the name of allah, Salam alikoum Daneshjuye,

Sorry I did not reply because I did not see your comment until today.Now I have downloaded all the pdf files about switch Mode Power supplies and I will try to read and understand. Last year I made my own high voltage linear classic DC power supply. It is a 6KV, 200mA, I use it for sputtering metals it is working very well..

I am interested in using the microwave Oven and its Matching circuit as you said . Can you give more information on this subject. I mean What are the changes I should do. Do I have to to dismantel the magnetron head and put it on the top of my vacuum chamber or use a cable to link it to my cathode which is inside the sputtering chamber.

And How to manufacture a matching circuit, L, C. What kind of capacitors I should use ? May I use Aluminium discs to build a capacitor?. and Cuper tube for L building? Please send me a photo or diagrame if you have one.

Best regrad