Hi, what software do you use for fitting? Almost every dedicated package calculates RSD automatically, and the definition and equations behind can be found in the respective manual(s). For CasaXPS, a short tutorial is available on youtube (search rsd casaxps).

Hi dear Miroslav Kolibal

Thank you for your attention

I used origin pro software for fitting. Does this software calculate RSD?

No, tbat is not dedicated software for such purpose. I strongly advise to use Unifit or CasaXps. In Origin you will probably not get correct peak shapes (Voigt at least), not even RSD, that you have to calculate yourself, its tricky to keep the peak ratios etc. Not difficult, but I wonder if thats worth the effort in Origin.

As already stated, please stay away rom Origin or peak fitting XPS data. and use a dedicated package which will take in to account the spectrometer transmission function amongst other factors, in addition to more control of peak shapes for fitting.