14 November 2013 8 3K Report

We are recently working with a plasma mixture of argon and CF4 gases produced in atmospheric pressure by microwave plasma torch. We are doing optical emission spectroscopy (OES) of this plasma.

We have got all the major and minor argon lines as expected. But we could not find any trace of fluorine in the spectrum. Though we have got strong CN violet systems and C2 swan bands indicating that CF4 is cracked inside plasma. My problem is where and how fluorine is coming out from plasma? I know that CF, CF2, and CF3 has emission in UV region (150-300 nm). But we did not get any clear molecular band in that region.

Does anybody have experience working with CF4 OES spectrum? If yes, please help us to understand why this is happening here and how are we missing fluorine presence ?

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