01 January 2014 13 6K Report

We are planning a pulsed plasma application that involves using a boron compound, decaborane in a dense plasma focus device. We expect the decaborane to partially disassociate and we want, if possible, to prevent boron deposition on our electrodes, as there seems no good way to clean them off. Does anyone have references as to boron deposition rates from a cooling gas? Or what sized particles can be expected? Or suggestions of how to prevent deposition? I would think this problem occurs in semi-conductor manufacturing, but I have found no good references.

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