Hi, I have a silicon die with 6-10 um high SU8 features (cured) and I want to bond that die to a plain silicon die (or glass, I am actually not particular about the top die).
If I am bonding to silicon, is there a resist that I can coat on the bare Si die that will stick to the SU8 on the bottom die, and preferably has thickness < 1.5 um?
HI,
Here is a short list of adhesion promoters available to purchase: OmniCoat, TI PRIME, and HMDS. In contrast to HDMI, TI PRIME is applied by spincoating. The TI PRIME adhesion promoter is sold as a promoter that improves resist adhesion on substrates like Si or glass. I think TI PRIME would work but I also listed the other two that I have heard of. I hope this might help you. Good luck.
Also, "I'm a Ramblin' Wreck from Georgia Tech and a hell of an engineer." I am a fellow alumni from 2011. It seems from what I was reading that things are humming along nicely there with campus growth. Good luck with your work!
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