The ModuLab XM MTS Test System provides the characterization of semiconductor materials and thin films and is able to test capacitance C-V, impedance, Mott-Schottky from 10 µHz to 32 MHz.

Could anyone help with the use of electrode while gathering the C-V data from MTS?. We know that thin films are sensible while the electrodes are in contact with them. How we proceed to overcome this issue without damaging the substrate while using the electrodes of MTS. 

Is there any additional option provided with MTS to make direct calculations that protect the thin film. Or the only solution is depositing the substrate by PVD and then making the C-V calculation?.