Dear Aman Arora ,

If you can handle the deposition substrate, the best way is to use X-ray reflectometry.

It is used to determine thickness, density, and roughness for single and multilayer stacks on semiconductor wafers; it might perform on both crystalline and amorphous materials.

It gives growth information like thickness, mismatching deposition pathway, and even interlayer formed compounds in the PVT experiment.

Best regards,

WNM