Does anyone has experience using both Lehighton and Kitec tools for semiconductor wafer sheet resistance measurement? Can you comment on the advantages and disadvantages of these two equipment?
Eddy current measurement for sheet resistance is a mature technology and something of a commodity. There might be minor technical differences, but the most important aspect for most will be support.
Following are commercial aspects: Kitec was the distributor for Lehighton Electronics in Europe for many years, so the products are derivative.
Semilab Zrt, through the Semilab USA LLC arm, acquired the assets of Lehighton Electronics. This has put the resources of a 650-person organization behind support. Semilab Taiwan has reinforced the existing support structure in Taiwan to provide very good applications support and service.
Semilab LEI maintains a robust patent portfolio while Kitec has few patents.
Full disclosure: I was part of Lehighton Electronics and am part of Semilab LEI.
Hi Benjamin,
Thanks for the info. You are the right person to provide the answer!
By the way, LEI has claimed that their system can measure a sample's carrier mobility, do you know technology behind and how reliable of the technique?
Hi Yuen-Yee, Sorry for the delay. The mobility measurement is based on microwave reflectance. It has been compared to conventional Hall measurements and shows a high correlation coefficient. I'll see if I can find a paper to share.
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