Most of the commercially available diamond CVD systems are based on microwaves. Is it not possible the same system with RF ? or What are the drawbacks with the RF plasmas for the same ?
You can read the following links:
1. https://experts.nebraska.edu/en/publications/growth-of-diamond-by-rf-plasma-assisted-chemical-vapor-deposition
2. Article Diamond deposition using a planar radio frequency inductivel...
3. https://www.cambridge.org/core/journals/journal-of-materials-research/article/abs/growth-of-diamond-by-rf-plasmaassisted-chemical-vapor-deposition/A47E56AAABAC81D30D2A47FE03568679
4. https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1146/0000/RF-Plasma-CVD-Of-Diamond-From-Oxygen-Containing-Gases/10.1117/12.962058.full?SSO=1
This might be of interest to you:
https://www.mdpi.com/2073-4352/9/1/32
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