Can a waveguide of titanium dioxide be formed over a silica substrate? If there are any such references please share that with me.
Hi,
At what wavelength are you working? Depending on that, you have to check two conditions to do so:
- refractive index of TiO2 has to be higher than the one of SiO2
- the losses of TiO2 should be "not too high" given the propagation length of your guide
TiO2/SiO2 can be etched either by plasma based on Fluor (SF6 for example) or by acids based on HF.
Simon
Titanium dioxide is used to fabricate dielectric mirrors, so I suspect it can be deposited onto silica, and subsequently patterned. https://en.wikipedia.org/wiki/Dielectric_mirror#Manufacturing
The refractive index is certainly high enough to form the core of a waveguide on silica https://refractiveindex.info/?shelf=main&book=TiO2&page=Devore-o
In general, yes. Maybe this is helpful: Furuhashi et al. - Development of microfabricated TiO2 channel waveguides - DOI: 10.1063/1.3615716
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