I am just curious if ATR/FTIR with golden gate setup can be used for perovskite oxide coated onto platinized silicon substrate, or it is necessary to implement other type of substrate.
The ATR/FTIR analysis may be useful. However, you must know how deep in the film your desired features are, as FTIR is NOT a surface sensitive technique. The analysis depth may range from 200-300 nm depending on the frequency of the scan.
If you're really looking for surface features ( upto ~ 10 nm deep in the film), I would rather suggest you to use XPS.