Now I am working on Si substrate and growth nano rod on Si by atmospheric pressure chemical vapor deposition. I have FTIR in range(400-4000)cm-1. After preparation at low temperature, the peak appeared in 410cm-1, but when increased the deposition temperature the peak shift to low wave number. Also when I increased the deposition temperature so more the peak will disappear. However the sample deposition high quality because of I have FESEM and XRD, I think this shift is due to the area under curve of Si-O bound increased. Is this idea right?

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