I have tried with LPCVD and ICPCVD but, they wont work because of large thickness. I need 960 nm thickness on quartz substrate. Now I am using 4 target deposition but the quality is very bad. There are lot of crack in deposition.
What about dip coating from a sol-gel solution, followed by a slow heating? Or, better, spin coating ? This method is known for providing excellent, optical-quality, thin coatings on many substrates.
Alain
You can try thermal evaporator since your film thickness is about a micron thick. Also you can try spray coating or thin film applicator to cast your film with a gol gel precursor.
I used thermal, but the quality is very bad. There are lot of crack in deposition.
Well. Then you should go for dip coating, spin coating or spray coating.
Best,
Kunal
Could you please tell me that, dip coating or spin coating will allow me to do patterning using EBL ? I am not much aware about spin coating process of Amorphous Si. Ultimately at the end, I want to grow Si cylinder on the top of Quartz substrate. The cylindrical disk diameter is 200 to 500 nm (variable) with height of 960 nm.
- Badges
- Science topic
- Similar topics
- Physical Sciences
- Materials Science
- Materials
- Inorganic Materials
- Metals
- Alloys
- Steel