I need to know the materials used as back Contact for the MOSCAP structure.Please reply ASAP.I will be grateful.

04 April 2016 1 8K Report

I am doing my research on MOSCAP structure .I need to do the experiments on back contact processing to determine the energy efficiency.

Abdelhalim Zekry

zeeshan,

The mos capacitor back electrode is commonly made of aluminum. In case of p-substrate you can directly deposit aluminum on the p-silicon and after annealing at about 450 degrees centigrade an ohmic contact will be formed between the p-silicon and the aluminum layer. If you have n-type substrate you may need to produce a thin n+- layer by phosphorus diffusion and then deposit the aluminum layer and anneal it as before.

wish you success.

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