I deposit calcium by UHV thermal evaporation using Ca metal charge, it leaves ashes in Boat & sides of film are blackish, is Ca film pure on all area?

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Jürgen Weippert

In general, XPS is always a good idea for such an issue.

A former colleague of mine had the same issue with Aluminium mirrors and the XPS I did showed lots of carbon and oxygen. It became a lot better in his case when he switched to a different effusion cell material (in his case corund).

K. Sreenivas

Very difficult to deposit calcium films.

They will immediately get oxidized.