i want to evaluate the effect of local process variation (intra-die ) on circuit performance (delay) using Hspice monte carlo simulation.

the problem is when i want to define the distribution of a process parameter (for example Vth) i found in some ressources that this parameter do not always follow a gaussian distribution,

Can anyone let me know how to express correctely my parameter for statistical analysis in this case ?

i want to use 90nm technology BSIM4 library

Thank you

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