We have a system for pulsed laser deposition. While operating, we are having vacuum-related issues. Without the use of a laser, we can initially maintain a vacuum of 100 pa, which will remain stable for 1 hour. After that, vacuum randomly decreases to zero and then displays numerical errors 41 and 51. Can anyone please explain why it occurs? and what we can do to solve this issue?
Is your vacuum gauge well-separated from the system, e.g. over a CF knee?
In my old machine I once evaporated some Cesium into a gauge and it started to display nonsense afterwards as well.
Is 100 Pa your deposition pressure? Suppose you use a gauge other than a capacitance manometer, due to high oxygen pressure. In that case, the gauge can show random readings, as they lose their sensitivity in an oxygen atmosphere. For an accurate reading, you can use a capacitance manometer for a certain range (choose only a specific range that is applicable to you). Because above or below the range of the capacitance manometer, it will not be effective. In this case, you can use two gauges for two different ranges.
Hi, are you using high vacuum pumps (Turbo or diffusion) along with the rotary pump? If yes, then your chamber has a leak somewhere, check every port of the chamber. Also, what is the meaning of 100Pa pressure, even a single rotary stage can create a vacuum up to 10-3 Torr (0.133 Pa). Regarding the error you are getting from the gauges, specify the type of gauges (company) you are using.
Don't use high vacuum gauges at this pressure (if this is actual). This will heavily damage your high vacuum gauges.
Good luck.
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