During MEMS production how can I control etch rate and stay away from detrimental effects of electrochemistry?
Perhaps this article could help you:https://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=2&SID=P1728MIHpFJpVNRN1C6&page=1&doc=1
Could you please give me the exact name of the articles so that I can take a look at them thanks to my university network.
The paper's name :GaN hexagonal pyramids formed by photo-assisted chemical etching method
We be glad to get someone who has experience
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