Hi Michal,

If you are looking for etching technologies for SEM you have to consider the type of SEM you have. These zirconates are typically relatively coarse with grain sizes > 1 micron. If you have a conventional SEM I would recommend etching at 1250-1350°C for 10 min in air, do not go higher than 10-15 kV. If you have an in lens SEM with higher resolution etch at 1150-1200°C for 5 min, stay below 5-10 kV.

You may have to play around with the etching parameters if the result is not perfect. Better use PtRh or Ir than Gold.

best regards

Frank