How to remove omnicoat from silicon wafer?

01 January 2016 1 8K Report

I put it into oxygen plasma for 30min, then remover PG 30min, 100 degree, it doesn't work!!! what did should i do? thanks

Marian Marik

Did you tried Piranha solution? 1xH2SO4 + 3x H2O2, It will remove most organic matter, but be carefoul - its a strong oxidizer.

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