I want to synthesis hexagonal Boron Nitride by CVD method. I read the paper and the author said that the reaction was conducted in the quartz tube with internal pressure of 50 Pa. How can we prepare the tube with low pressure.
By connecting to a vacuum system! Mechanical vacuum pumps can go down to 5 Pa or about 0.037 torr.
Krishnan Raja thank you
Our CVD system for carbon nano structures is evacuated by rotary pump go to 10-2 mbar, which is about 1Pa.
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