Hello,

I have a sample of Al2O3 which covered by SiC in 4 cycle (The process showed in the picture). Now, I want to polish my sample to use EBSD but I can't because Silicon crystals are harder than Alumina and Alumina polish easily while always there are some dots in the surface which are Silicon particles. I used all sand papers from 50 micrometers to 1 micrometers and decreased the grade gradually but the result was not good again. What should I do?

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