How to measure the third harmonic of discharge current in a capacitively coupled rf discharge?

13 July 2020 1 4K Report

I have tried to measure the third harmonic of discharge current performing FFT of the discharge current signal. I found out that the amplitude of the third harmonic is not prominent enough to detect.

Can anyone suggest me some methods to measure the same distinctly?

Johannes Gruenwald

A first thing you can try is to insert a high pass filter into your measurement circuit in order to get rid of any low frequency disturbance of your signal.

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