Hello.

I would like to measure electron density of Argon ICP (Inductively Coupled Plasma). Our goal is to generate ICP with electron density of 10^13 cm^(-3) order thus the range of this density must be able to be measured.

I thought measuring Stark-broadened width of emission line from hydrogen atoms after intentionally mixing ~1% hydrogen gas to plasma gas (it is Argon here.) is good idea but some papers only show Stark-broadening table from 10^14 (cm-3) to higher densities.

I'm now afraid that 10^13 cm^(-3) may be too hard to measure.

The plasma length is about 10 cm and its width about 1.5 cm.

Could you please suggest me good method to measure the density of this range?

More Donggyu Jang's questions See All
Similar questions and discussions