I would recommend you to use one of the examples already given in Sentaurus. I had been working with it long ago and produced ideal CV curve by using these examples. As I remember, it was NMOS or PMOS. You need to modify it a little.
When i am adding new material like BeO2 etc. then it shows the error msg "UNDEFINED model Epsilon" . If i use CheckUndefinedModels then it does not show error but its giving the same results as with the silicon material. Please help me out.