We usually see an improvement in adhesion by using either corona or plasma treatment of surface before applying the TiO2.

First ensure your ITO is properly cleaned. What is the protocol that you have currently adopted? I would suggest starting with ultrasonic agitation in a solvent (e.g., acetone and then IPA) , eventually finishing with a filtered DI H2O rinse. If you must, dry off using an N2 gun (ideally with filter nozzle).

Then, as a surface activation step, further to the suggestions from Robb Engle , you could also use a simple UV-Ozone cleaner for 10 min to improve the adhesion.

Dr Kutraleeswaran Manickam , this problem generally happens if your substrate is not properly cleaned. Make sure you have polished and cleaned your substrates with standard metallurgical processes. The surface roughness should be as low as possible, because rough surface has low adhesion, so it is necessary to polish your substrates as well. If the sticking or adhesion problem still persists, you can try plasma etching or surface treatment to remove surface contamination. Also mention, which method you use to deposit TiO2 film? solgel? or PVD? . . .

I used as sol gel method, our research lab doesn't have N2 gun, UV ozone cleaner. Any other method.

For sol-gel, I would recommend spin coating process. This is very efficient and productive method, specifically for thin and homogeneous coatings with good adhesion. I have never seen any lab without N2 gas. For further insights, you can read following papers:

1. Effect of post-deposition annealing treatment on the structural, optical and gas sensing properties of TiO 2 thin films , Key Engineering MaterialsVolume 510-511, Issue 1, 2012, Pages 467-474

2. Applied Surface ScienceVolume 259, 15 October 2012, Pages 270-275

Characterization and hydrogen gas sensing properties of TiO 2 thin films prepared by sol-gel method

3. Key Engineering MaterialsVolume 543, 2013, Pages 293-2962nd International Conference on Materials and Applications for Sensors and Transducers, IC-MAST 2012; Budapest; Hungary; 24 May 2012 through 28 May 2012; Code 96422

Structure of hydrogen gas sensing TiO2 thin films prepared by sol - Gel method and their comparison with magnetron sputtered films

4. Journal of Crystal GrowthVolume 338, Issue 1, 1 January 2012, Pages 118-124

Strong biaxial texture and polymorph nature in TiO 2 thin film formed by ex-situ annealing on c-plane Al 2O 3surface

Dr Kutraleeswaran Manickam you can refer this article

By adding polymers such as polyethylene glycol ....and other reagents such as polyvinyl alcohol ...

Thank you sir.....