I am trying to characterize ZnO nanocrystal films out of nanoparticles deposited via spin coating (ca. 35nm thickness) on a glass substrates coated with ITO. The films have a lot of "holes" (round defects about 100nm in diameter). If I do electrical characterizations I therefor only see short circuits. Are there any ways to reduce the amount of defects in these films and improve the surface flatness of the films? Does anyone have experience with spin coating of ZnO nanoparticles? I can't seem to find anything specific in the community. Thank you very much