How to import SEM images into GDSII editor in Raith Pioneer software?

14 December 2021 1 10K Report

I have been trying to connect 2D materials with pre-patterned bigger Au pads on SiO2/Si substrate using the Raith Pioneer electron beam lithography system. I am facing difficulties in importing SEM images into the GDSII editor and drawing connecting electrodes in the GDSII/SEM overlay. Can anyone suggest how to import the SEM image file into the GDSII editor? Further, is it possible to perform 3 point alignment using the same SEM image?

Guy Mélard

I typed your request in Google and found the link https://www.google.com/url?sa=t&rct=j&q=&esrc=s&source=web&cd=&cad=rja&uact=8&ved=2ahUKEwi1nqecr-X0AhVQyqQKHSMmBjUQFnoECB4QAQ&url=http%3A%2F%2Fresearch.physics.illinois.edu%2Fbezryadin%2Flabprotocol%2Fe_LiNE%2520Software%2520Reference%2520Manual.pdf&usg=AOvVaw07oU40VfIjuiMDVk_krVbY. Did you look in that manual?

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