Quantification: If you want to use CasaXPS, here's the description for the deconvolution: http://www.casaxps.com/help_manual/manual_updates/peak_fitting_in_xps.pdf
In principle, the strategy is to fit the measured C1s signal with a set of components and compare their percentages. The O content of your substance can additionally be verified by determining the full stoichiometry. Of course, carbon can be tricky to deconvolute because you can have different line shapes, especially when there is sp2 carbon present.