Hello Everyone,
I am simulating a PZT actuator on a Silicon Nitride waveguide to observe stress distribution in the whole structure, including the waveguide. I am using COMSOL Multiphysics for simulation. The design is based on a publication, and I am getting stress into the PZT layer by applying voltage on the Pt electrodes (See the attachment). However, I need to get the stress in the waveguide structure (Si3N4 waveguide and surrounding SiO2 cladding). I am using Solid Mechanics and Electrostatics physics to observe the stress distribution. Do I need to couple other physics to obtain the stress distribution in the waveguide structure? How can I get the stress in the waveguide?
Your valuable suggestions will be highly appreciated in solving this issue.
Thank you in advance.
Hi,
Actually, you have to calculate the stress optic coefficients for SiN, then if you apply stress you will get the effective refractive index. please see the attached formulae it may help you
@Nagarajan Nallusamy ... Thank for your reply. I know this formula but in the simulation design there is no stress in the SiN waveguide. Therefore no refractive index has changed. I want to know how to get stress in the waveguide structure as like the PZT structure.