It could be done by traditional photolithography using a photoresist if the dimensions are micron size or larger.

There are different ways to etch ITO. For dry etching one can use RIE or ICP. But mostly wet etching in diluted HCl works well.  

Most of the commercial ITO providers use laser deletion (at UV wavelength) to pattern the glasses. Hence, I can suggest you laser deletion if it is possible,

All the best.

It's very important

Thanks a lot

Welcome

Thin film electrode.