How to determine atomic percentage from XPS survey spectra?

1. What is the impact of having different scales in a survey? and how can we solve this problem before and after data collection (Literature)?

1. What is the impact of having different scales in a survey? and how can we solve this problem before and after data collection (Literature-based reflection)? Thank you for your time and for...

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Jürgen Weippert

Please see this other discussion:

https://www.researchgate.net/post/Please_help_how_can_i_calculate_the_quantitation_peak_mole_percentage_of_XPS_Data

If the links therein don't help you, please specify the exact problem.

Mahya Liri

Thank you for your response. I would appreciate it if you could help me understand the correct way to determine the atomic percentage of the elements.

I use Tougaard background and after subtracting the baseline, I calculate the atomic fraction (AF) using the following equation:

AF(%)=(Area(i)/RSF(i))/Σ(Area(i)/RSF(i))

(RSF=Relative Sensitivity Factor)

Please be always sure to cite which set of sensitivity factors you are using, there are also different ones. I'm not saying you need to switch, but for reproducibility the set has to be specified.

When I look at the baselines, it seems to me they are cutting a little into the flesh of the peak on the left side each time, so please make sure that doesn't happen. I am not in fundamental opposition towards using Origin for XPS evaluation, but you have to be a lot more careful it does the right thing than when you're using a dedicated XPS software,

Edit: at second glance, have you tried putting one big Tougaard line through the while spectrum? I think the normal way would be to subtract the peaks individually.