I have fabricated a sample size of 40 micron x 40 micron using Electron beam lithography. I need to characterize the sample to obtain reflection and transmission spectrum of the fabricated structure. Could you please suggest the optical set-up?
I have halogen source and a spectrometer. But the main issue is, when I try to focus light using focusing lens, the spot size of the beam is more than the fabricated area of the sample. So, I am not able to get the exact spectrum of the sample.
You maybe lucky if a befriended laboratory has a CRAIG microscope with built-in microscopic image reflectance spectrometer.
Sir, It is possible to do with and without sample. However, I am not sure of the reliability of results. I will try with the suggested approach. Thank you.
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