How to achieve high precision non-contact 3 DOF position measurement?

12 September 2018 0 4K Report

Hello everyone

I want to get 3 DOF position information of tool tip with 1um-10um resolution. But there is maybe not commercial system could do it. And the position sensitive detector is used for high speed position measurement in previous papers. I don't know if it is real reasible.

I major in Mechanical Engeerning, and I have little knowledge about optical measurement.

Anyone could give me some advice? For example some related books or papers.

English is my second language, excuse my poor English skiils.

Thank you

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