I know Si wafer can be hydroxylate by piranha solution but I don't know how long will hydroxyl group remain, either in air or distilled water. One hour, one day or ...?
The question should emphasise after how much time the surface will be recontaminated. This is course strongly dependent on the surrounding.
And "no" the wafer surface is reactive towards distilled water within minutes (after RCA cleaning), compare to our own publication.
Concerning the cleaning procedures I like the contribution of Palmskog even if the contact angle measurements are not state of the art.
Conference Paper Wetting properties of silicon surfaces
Article Detailed statistical contact angle analyses; “slow moving” d...
Thank you Ms. Li and Dr. Schmitt.
I do not RCA cleaning, only I have treated silicon by piranha solution to hydroxylate surface and for next steps, I have to take it to other place. So, I want to do such procedure that hydroxyl group remain longer.
Hi,
Do you know the mechanism of formation of hydroxyl groups on silicon using piranha?
Thank you
Dear Chloé Rodriguez,
can you share some papers about mechanism of hydroxyl groups formation?
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