I want to know the required etchant material for wet etching of MgO from the glass substrate.I read somewhere that aqueous Ammonia solution can etch MgO but not able to understand the process.Also can I use reactive ion etching method for the same?
Dear Dr. Aman Mishra,
MgO was found to be very easy to etch in H2SO4 ; the etching time was 20 s for complete removal of the thin film, resulting in an etching rate of 210 Å/s. Baking of the thin film for 24 h at 500 °C gave an etching rate of 83 Å/s, still fast. It seems that the coating changed its morphology after baking.
For details please see at the source:
WET ETCHING OF OPTICAL THIN FILMS.
By Curt Edstrom
Thesis Work 2010 – Chemical Engineering
Available at: https://www.researchgate.net/publication/325171212_WET_ETCHING_OF_OPTICAL_THIN_FILMS.
Best regards, Pierluigi Traverso.
@Pierluigi Traverso Can I do etching using HF also.?
I read the link you have sent but I need proper concentration of the etchant and step by step method to etch the thin film.Can you send some other link for the same?
Dear Dr. Aman Mishra,
perhaps, as was said in a previous discussion here on ResearchGate by Dr. Pieter Westerik, you could also try to use a 1% aqueous solution of hydrofluoric acid (able to remove native oxide on silicon substrate) within one minute. If your silicon was oxidized by a high temperature treatment you may need more time or higher concentration of HF.
Also remember that hydrofluoric acid could attack glass surface (... as other various metals) and it has a rather high toxicity.
In the same discussion a 50% H2S04 solution was suggest, followed by a hot water deionized wash. Personally, I would try different etching at a much lower concentration than H2SO4 and evaluate the result. Only then, eventually, would I increase the concentration and / or attack times.
As reference regarding HF etching:
Fluorine Compounds—Advances in Research and Application: 2013 Edition
Q. Ashton Acton Ed. , Published by Scholarly Editions, Atlanta, Gerorgia,
Partially available at: https://books.google.it/books?id=_q7K06fyZk8C&pg=PA510&lpg=PA510&dq=etch+mgo+thin+film+from+the+glass+substrate&source=bl&ots=PL4-in--lC&sig=ACfU3U2-QJfbMJPg_3q1Ubd8O4mIaJFvKw&hl=it&sa=X&ved=2ahUKEwj6lejd9J3lAhVQjqQKHSsrD5c4ChDoATAHegQICBAB#v=onepage&q=etch%20mgo%20thin%20film%20from%20the%20glass%20substrate&f=false
Good work and best regards, Pierluigi Traverso
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