In a DC sputtering diode system, the positive ions follow the electric field direction till they hit the target to eject materials, while the electrons move in the opposite direction.
- how do the electrons reach the anode if the substrate was not conductive?
- the net current direction should be in the same direction of the electric field, where is the closed path of ion and electron currents?
An electric field can penetrate a dielectric barrier. The dielectric will become polarized slightly. So, if the dielectric is attached to a conductive electrode as shown in your diagram, the electric field lines would go through the dielectric and into the metal. The ions would then follow the field lines and impact the surface of the dielectric, thus sputtering material from the surface.
Alright so the electrons? Do they accumulate on the glass? or break the glass
electron sputtering needs really high kinetic energies in the order of several 10's of keV, so "breaking" the glass is close to impossible in your case, I would say. They should form an electron rich sheath on the surface of your glass instead.
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